- Full stencil inspection
- Fast and accurate high resolution scanning of:
- - Aperture presence
- - Aperture size and shape verification
- - Image positional accuracy
Tecan's LPKF ScanCheck system verifies all stencils against their respective CAD data files. Each aperture is checked for conformance to the required physical dimensions including shape and positional accuracy. ScanCheck is the only system that offers both image verification and accurate inclusive aperture measurement in a single high resolution scan.
The system can scan and fully inspect up to 500,000 apertures on a wafer-bumping stencil in approximately 12 minutes using a resolution of 12,000 DPI. A scanning area of 470mm x 660mm allows both large single images and multiple images to be fully accommodated in a single scan, whilst maintaining an accuracy of +/- 10Ám across the entire bed.
The scanned data for each stencil is archived and stencil quality reports are available on request. All Tecan stencils are manufactured in accordance with both the customers' requirements and with internal ISO 9000 quality control procedures.
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