Micro-Photo Electro Forming (Micro-PEF) is an evolution of conventional Photo Electro Forming (PEF) and has been developed by Tecan to meet demand for microstructured parts and tools.
Within a class 1,000 cleanroom environment, Tecan uses high-resolution photoresists, planar-surfaced substrates and mask aligning technology to produce single and multi-level microstructures at levels of extreme precision.
Built at a cost of £1.5 million and opened by HRH Prince of Wales in 2001, the class 1000 cleanroom environment, has a cascading pressure differential with tightly controlled temperature and humidity. This ensures the provision of particle-free environments where components with sub-micron features can be repeatedly and consistently fabricated.
It is staffed by some of the world’s leading experts in micro-technology and is equipped with an array of specialised precision lithography and electroforming equipment.
Capability for the measurement and testing of micro-parts in the cleanroom includes:
- Leica VMM200 measuring microscope
- Zeiss Axiotron inspection microscope
- Zygo Newview 5000 white light interferometer
- 2 x Mitotuyo QV coordinate measuring machines